Programme: “Student Research Clubs create innovations”
Project: “Fabrication and evaluation of microcantilevers with diamond tips for surface measurements”
Project applicant: Students' Scientific Association SPENT
Funding period: 2021 - 2022 r.
Amount of funding: PLN 70,000 zł


Description of project:
Silicon microcantilevers are part of the MEMS (microelectromechanical system) class of devices. They are typically fabricated in silicon and used in nanometrology. The metrological properties of a measuring probe depend on its material, in particular the material of the tip. Its hardness determines the durability of the probe, while the diameter curvature affects the precision of atomic layers measurements. Among the available materials, diamond, which is extremely wear resistant, is of interest. Its doping enables electrical measurements to be carried out. Prospects for its usage include reliable tips for SPM (scanning probe microscopy), field emitters and also nanolithography and nanoscratching process.

Project stages:
1.    design and fabrication of a microcantilever for diamond tip deposition (collaboration with the Institute of Microelectronics and Photonics),
2.    design and realization of current transducer and control system for SEM/SIM (scanning electron/ion microscope) and AFM (atomic force microscope),
3.    deposition of diamond microtips on microcantilevers in FEBID (focused electron beam induced deposition) technology inside the vacuum chamber of a SEM/SIM (synthesis of diamond microparticles – Gdansk University of Technology),
4.    characterisation of microcantilevers mechanical properties by a laser vibrometer before and after diamond deposition process,
5.    diamond tip probe nanometrology of sample surfaces by AFM. Evaluation of the probe and comparison to commercial solutions,
6.    reporting of results. Preparation of conference materials and papers.

Contact:
Bartosz Pruchnik (bartosz.pruchnik@pwr.edu.pl)
Ewelina Gacka (ewelina.gacka@pwr.edu.pl)
prof. dr hab. inż. Teodor Gotszalk (teodor.gotszalk@pwr.edu.pl)
dr hab. inż. Andrzej Sikora, prof. uczelni (andrzej.sikora@pwr.edu.pl)