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QUANTUM STRUCTURES IN TECHNOLOGY OF SEMICONDUCTOR DEVICES
MONOGRAPH SUMMARY
The fast development of microelectronic and optoelectronic devices technology has indisputably influenced the standard of our present life. However, many theoretical and technological limitation must have been overcame. Elaboration of epitaxial crystallization methods has made possible to investigate and utilize both, the new semiconductor compounds and alloys as well as the low-dimensional structures LDS (such as quantum wells – QWs, quantum wires – QWr and quantum dots – QDs). Taking advantage of available structural and material solutions of advanced semiconductor devices a number of predefined postulates of quantum mechanics have been practically confirmed in the experiment. In this work, selected aspects of the design, technology, characterization and utilization in semiconductor optoelectronic devices of low-dimensional semiconductor structures have been discussed. For the purpose of this book a number of examples have been quoted from both, the literature and the achievements of the author from the period of 2006–2016. The described research works of the author are both, basic research – which results, among the others, in elaboration of algorithm of structural characterization of monocrystalline semiconductor structures with multicomponent quantum wells, as well as R&D – which results in fabrication of advanced optoelectronic structures. In order to introduce the reader to the subject of technology of semiconductor quantum structures there have been also discussed the epitaxial growth modes and the methods of precise diagnostic and control of the crystallization processes. However, the author draws particular attention to these technological solutions and construction features of the epitaxial systems that allow the precise production of low-dimensional structures. |